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E15000 - SEMI E150 - Guide for Equipment Training Best Practices StdPbc-0922 1 The scope of this

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Description

1  The scope of this Standard is all grades of ammonium fluoride 40% used in the semiconductor industry

and Flatness of Bonded Wafer Stacks

The test methods described can also be used by semiconductor manufacturers to check the performance of equipment and to verify its conformance with procurement specifications

if available

Existing specifications for the EUV substrate

E15000 - SEMI E150 - Guide for Equipment Training Best Practices StdPbc-0922 1 The scope of thisNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: Paragraphs entitled NOTE: are not an official part of this Standard or Safety Guideline and are not intended to modify or supersede the official Standard or Safety Guideline. These have been supplied by the global

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