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M04700 - SEMI M47 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications StdTpc-Sensor Actuator Network near the top surface region

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Description

near the top surface region of the wafer

To evaluate OPV/DSSC/PSC performance during a thermal cycle test

The International System of Units (SI) is used as the standard unit of measure in this Document

the testing parameters should be agreed upon by the manufacturer and the user

本スタンダードは, Metrics Global Technical Committeeで技術的に承認されている。現版は2007年1月18日,global Audits and Reviews Subcommitteeにて発行が承認された。2007年2月にwww

M04700 - SEMI M47 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications StdTpc-Sensor Actuator Network near the top surface regionThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 25, 2007. Initially available at www. semi. org in October 2010. Originally published November 2001; previously published July 2007. NOTICE: This document was balloted and approved for withdrawal in 2010. This specification defines thin layer silicon on insulator (SOI) wafer

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