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SEMI C90 — Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems
The scope of this Document covers grades of 1
SEMI C92-0216 (first published)
If differences should exist between the English version and a translation in any other language
but may also be useful in other applications
C04500 - SEMI C45 - Specification and Guide for Tetraethylorthosilicate (TEOS) Revision:SEMI C45-0301 - Superseded SEMI C90 — Test MethodThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in May 2018; originally published June 1999; previously published June 2009. The purpose of this Document is to standardize requirements for tetraethylorthosilicate used in the semiconductor industry