D02800 - SEMI D28 - Specification for Mechanical Interface Between Flat Panel Display Material Handling Equipment and Tool Port, Using Automated Guided Vehicle (AGV), Rail Guided Vehicle (RGV), and Manual Guided Vehicle (MGV) StdPbc-0418 to be published October 2000

to be published October 2000

SEMI C41 — Specifications and Guidelines for 2-Propanol

41 — Standard for Oxygen (O2)

SEMI D63-0811 (first published)

SEMI D21-1000 (technical revision)

D02800 - SEMI D28 - Specification for Mechanical Interface Between Flat Panel Display Material Handling Equipment and Tool Port, Using Automated Guided Vehicle (AGV), Rail Guided Vehicle (RGV), and Manual Guided Vehicle (MGV) StdPbc-0418 to be published October 2000This Standard was technically approved by the Flat Panel Display Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. Available at www. semi. org in July 2008; originally published November 2001. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or