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the actual diameter of nominal 300 mm wafers may millimeters smaller
or from subsequent exposure to ambient air or non-dry gas
The quality parameters assessed
This Test Method defines the surface defect characterization requirements and the acceptance criteria for GaN based LED epitaxial wafers
E02100 - SEMI E21 - Specification for Cluster Tool Module Interface: Mechanical Interface and Wafer Transport StdPbc-0521 and additional transaction details ofNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to simplify cluster tool implementation in the fab. Equipment suppliers are required to provide modules that can be connected into any cluster tool using the specifications contained
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