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1 This Test Method uses Euclidean techniques
This Specification covers the content
production equipment including process and metrology equipment
processing may be specified in terms of either material type
SEMI G96-1014 (first published)
M06300 - SEMI M63 - Test Method for Measuring the Al Fraction in AlGaAs on GaAs Substrates by High Resolution X-Ray Diffraction Revision:SEMI M63-0306 - Superseded 1 This Test Method usesThis Test Method describes the use of high resolution X ray diffraction (HRXRD) as a means of measuring the Al fraction in an AlGaAs epilayer on GaAs substrates, by defining the experimental method and explaining the analysis. This Test Method addresses measurement of the composition of unrelaxed, undoped AlGaAs epilayers on <001> oriented GaAs substrates. Principles are given for a standardized measurement method. There are differing parameters for
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